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Toplam kayıt 11, listelenen: 11-11
A review of piezoelectric MEMS sensors and actuators for gas detection application
(Springer, 2023)
Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic ...