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A review of piezoelectric MEMS sensors and actuators for gas detection application

Ba Hashwan, Saeed S.; Khir, Mohd Haris Md.; Nawi, Illani Mohd; Ahmad, Mohamad Radzi; Hanif, Mehwish; Zahoor, Furqan; Al-Douri Y.; Algamili, Abdullah Saleh; Bature, Usman Isyaku; Alabsi, Sami Sultan; Sabbea, Mohammed O. Ba; Junaid, Muhammad (Springer, 2023)

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic ...